Mass HFC 303

​The HFM-301 / HFC-303 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-301 / HFC-303 services a wide variety of applications. Cleaning for oxygen service is available.

±1% of full scale Accuracy

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​​​Applications and Industries

  • Leak Testing
  • Flame Spray
  • Gas Blending
  • Semiconductor Process
  • Thin Film Deposition​